Plasma System
Low-pressure plasma system V6-G
Efficient tabletop unit
Available options
••Vacuum pump
••Ozone trap
••Second gas channel
••Rotating drum for bulk material treatment
••Further options on request
This compact low-pressure plasma device is designed as a tabletop unit. A professional PLC control unit serves as a storage for definable process parameters. The standard unit V6-G is designed as a tabletop device for industrial small series production as well as for the low-pressure plasma treatment in R & D laboratories.
Technical data
Outer dimensions: approx. W 760 x H 520 x D 510 mm
Inner dimensions process chamber: approx. W 170 x H 170 x D 200 mm
Microwave power generator: 2.45 GHz, variable power 50 W up to max. 300 W
Gas supply: 1 gas channel with mass flow controller and magnetic valve
Vacuum connection: DN 16 KF
Electrical connection: 230 V, 50 / 60 Hz, 0,5 kW (without vacuum pump)
Process control: PLC control unit (PP 35 by B & R)
Vacuum gauge: Pirani
Surface treatment methods: cleaning, activation
Low Pressure Plasma System V160 - 2G
Designed for: Activation and cleaning
Inside dimensions: 350 x 910 x 510 mm (H x W x D)
Overall dimensions: 1735 x 2800 x 1345 mm (H x W x D)
Process controller: PLC with visualisation unit
Low Pressure Plasma System V300 - 4GR
Designed for: Cleaning of Drillholes
Outside dimensions: 2110 x 1920 x 910 mm (W x H x D)
Process controller: IPC
Coiling device: max. Diameter: 267 mm max. width: 48 mm
Low-pressure plasma system V55-GKM
The highly flexible standard device
Available Options
••Vacuum pump
••Ozone trap
••Further gas channels
••kHz generator (40 kHz)
••MHz generator (13,56 MHz)
••Rotating drum for bulk material treatment
••Rotating table
••Variable interfaces
••Exhaust gas scrubber
••Automatical door opening and closing (sliding door version)
••Liquiflow controller
••Chamber liner
••Soft-start and slow-vent
••Further frequencies (kHz, MHz) possible
Technical data Outer dimensions: approx. W 600 x H 1.850 x D 880 mm
Inner dimensions process chamber: approx. W 400 x H 340 x D 450 mm
Microwave power generator: 2,45 GHz, from 100 W up to max. 1.200 W
Gas supply: 2 gas channels with mass flow controllers and and magnetic valves
Vacuum connection: DN 40 KF
Electrical connection: 230 / 400 V, 50 / 60 Hz, 2,2 kW (without vacuum pump)
Process control: PLC control unit (PP 450 by B & R)
Vacuum gauge: capacitance manometer (independent of gas type)
Printer: 8-pin standard paper printer
Surface treatment methods: cleaning, activation, etching, coating
Low Pressure Plasma System V620 - 2G
Designed for: Activation and cleaning
Basket dimensions: 390 x 690 x 370 mm (H x W x D)
Overall dimensions: 1700 x 3300 x 1200 mm (H x W x D)
Process controller: PLC with visualisation unit